Transversely-excited film bulk acoustic resonator with concentric interdigitated transducer fingers

ABSTRACT

Acoustic resonator devices, filters, and methods. An acoustic resonator includes a substrate and a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate. A conductor pattern on a front surface of the piezoelectric plate includes concentric interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars. The IDT fingers are on the diaphragm.

RELATED APPLICATION INFORMATION

This patent claims priority from the following provisional patent applications: 63/185,457, filed May 7, 2021, entitled CONCENTRIC XBAR, the entire content of which is incorporated herein by reference.

NOTICE OF COPYRIGHTS AND TRADE DRESS

A portion of the disclosure of this patent document contains material which is subject to copyright protection. This patent document may show and/or describe matter which is or may become trade dress of the owner. The copyright and trade dress owner has no objection to the facsimile reproduction by anyone of the patent disclosure as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright and trade dress rights whatsoever.

BACKGROUND Field

This disclosure relates to radio frequency filters using acoustic wave resonators, and specifically to filters for use in communications equipment.

Description of the Related Art

A radio frequency (RF) filter is a two-port device configured to pass some frequencies and to stop other frequencies, where “pass” means transmit with relatively low signal loss and “stop” means block or substantially attenuate. The range of frequencies passed by a filter is referred to as the “pass-band” of the filter. The range of frequencies stopped by such a filter is referred to as the “stop-band” of the filter. A typical RF filter has at least one pass-band and at least one stop-band. Specific requirements on a pass-band or stop-band depend on the specific application. For example, a “pass-band” may be defined as a frequency range where the insertion loss of a filter is better than a defined value such as 1 dB, 2 dB, or 3 dB. A “stop-band” may be defined as a frequency range where the rejection of a filter is greater than a defined value such as 20 dB, 30 dB, 40 dB, or greater depending on application.

RF filters are used in communications systems where information is transmitted over wireless links. For example, RF filters may be found in the RF front-ends of cellular base stations, mobile telephone and computing devices, satellite transceivers and ground stations, IoT (Internet of Things) devices, laptop computers and tablets, fixed point radio links, and other communications systems. RF filters are also used in radar and electronic and information warfare systems.

RF filters typically require many design trade-offs to achieve, for each specific application, the best compromise between performance parameters such as insertion loss, rejection, isolation, power handling, linearity, size and cost. Specific design and manufacturing methods and enhancements can benefit simultaneously one or several of these requirements.

Performance enhancements to the RF filters in a wireless system can have broad impact to system performance. Improvements in RF filters can be leveraged to provide system performance improvements such as larger cell size, longer battery life, higher data rates, greater network capacity, lower cost, enhanced security, higher reliability, etc. These improvements can be realized at many levels of the wireless system both separately and in combination, for example at the RF module, RF transceiver, mobile or fixed sub-system, or network levels.

High performance RF filters for present communication systems commonly incorporate acoustic wave resonators including surface acoustic wave (SAW) resonators, bulk acoustic wave (BAW) resonators, film bulk acoustic wave resonators (FBAR), and other types of acoustic resonators. However, these existing technologies are not well-suited for use at the higher frequencies and bandwidths proposed for future communications networks.

The desire for wider communication channel bandwidths will inevitably lead to the use of higher frequency communications bands. Radio access technology for mobile telephone networks has been standardized by the 3GPP (3^(rd) Generation Partnership Project). Radio access technology for 5^(th) generation mobile networks is defined in the 5G NR (new radio) standard. The 5G NR standard defines several new communications bands. Two of these new communications bands are n77, which uses the frequency range from 3300 MHz to 4200 MHz, and n79, which uses the frequency range from 4400 MHz to 5000 MHz. Both band n77 and band n79 use time-division duplexing (TDD), such that a communications device operating in band n77 and/or band n79 use the same frequencies for both uplink and downlink transmissions. Bandpass filters for bands n77 and n79 must be capable of handling the transmit power of the communications device. WiFi bands at 5 GHz and 6 GHz also require high frequency and wide bandwidth. The 5G NR standard also defines millimeter wave communication bands with frequencies between 24.25 GHz and 40 GHz.

The Transversely-Excited Film Bulk Acoustic Resonator (XBAR) is an acoustic resonator structure for use in microwave filters. The XBAR is described in U.S. Pat. No. 10,491,291, titled TRANSVERSELY EXCITED FILM BULK ACOUSTIC RESONATOR. An XBAR resonator comprises an interdigital transducer (IDT) formed on a thin floating layer, or diaphragm, of a single-crystal piezoelectric material. The IDT includes a first set of parallel fingers, extending from a first busbar and a second set of parallel fingers extending from a second busbar. The first and second sets of parallel fingers are interleaved. A microwave signal applied to the IDT excites a shear primary acoustic wave in the piezoelectric diaphragm. XBAR resonators provide very high electromechanical coupling and high frequency capability. XBAR resonators may be used in a variety of RF filters including band-reject filters, band-pass filters, duplexers, and multiplexers. XBARs are well suited for use in filters for communications bands with frequencies above 3 GHz. Matrix XBAR filters are also suited for frequencies between 1 GHz and 3 GHz.

DESCRIPTION OF THE DRAWINGS

FIG. 1 includes a schematic plan view, two schematic cross-sectional views, and a detail view of a transversely-excited film bulk acoustic resonator (XBAR).

FIG. 2 includes a schematic plan view and a schematic cross-sectional view of an XBAR with concentric interdigital transducer (IDT) fingers.

FIG. 3 includes a schematic plan view and a schematic cross-sectional view of another XBAR with concentric IDT fingers.

FIG. 4 is a schematic plan view of an IDT with concentric fingers.

FIG. 5A is a graph of acoustic wave velocity as a function of angle.

FIG. 5B is a schematic plan view of an exemplary electrode pattern for an XBAR when acoustic wave velocity is not isotropic.

FIG. 6 is a schematic block diagram of a filter using XBARs.

FIG. 7 is a flow chart of a method for fabricating an XBAR.

Throughout this description, elements appearing in figures are assigned three-digit or four-digit reference designators, where the two least significant digits are specific to the element and the one or two most significant digit is the figure number where the element is first introduced. An element that is not described in conjunction with a figure may be presumed to have the same characteristics and function as a previously-described element having the same reference designator.

DETAILED DESCRIPTION

Description of Apparatus

FIG. 1 shows a simplified schematic top view, orthogonal cross-sectional views, and a detailed cross-sectional view of a transversely-excited film bulk acoustic resonator (XBAR) 100. XBAR resonators such as the resonator 100 may be used in a variety of RF filters including band-reject filters, band-pass filters, duplexers, and multiplexers. XBARs are particularly suited for use in filters for communications bands with frequencies above 3 GHz.

The XBAR 100 is made up of a thin film conductor pattern formed on a surface of a piezoelectric plate 110 having parallel front and back surfaces 112, 114, respectively. The piezoelectric plate is a thin single-crystal layer of a piezoelectric material such as lithium niobate, lithium tantalate, lanthanum gallium silicate, gallium nitride, or aluminum nitride. The piezoelectric plate is cut such that the orientation of the X, Y, and Z crystalline axes with respect to the front and back surfaces is known and consistent. In the examples presented in this patent, the piezoelectric plates are Z-cut, which is to say the Z axis is normal to the front and back surfaces 112, 114. However, XBARs may be fabricated on piezoelectric plates with other crystallographic orientations.

The back surface 114 of the piezoelectric plate 110 is attached to a surface of the substrate 120 except for a portion of the piezoelectric plate 110 that forms a diaphragm 115 spanning a cavity 140 formed in the substrate. The portion of the piezoelectric plate that spans the cavity is referred to herein as the “diaphragm” 115 due to its physical resemblance to the diaphragm of a microphone. As shown in FIG. 1, the diaphragm 115 is contiguous with the rest of the piezoelectric plate 110 around all of a perimeter 145 of the cavity 140. In this context, “contiguous” means “continuously connected without any intervening item”. In other configurations, the diaphragm 115 may be contiguous with the piezoelectric plate around at least 50% of the perimeter 145 of the cavity 140.

The substrate 120 provides mechanical support to the piezoelectric plate 110. The substrate 120 may be, for example, silicon, sapphire, quartz, or some other material or combination of materials. The back surface 114 of the piezoelectric plate 110 may be bonded to the substrate 120 using a wafer bonding process. Alternatively, the piezoelectric plate 110 may be grown on the substrate 120 or attached to the substrate in some other manner. The piezoelectric plate 110 may be attached directly to the substrate or may be attached to the substrate 120 via one or more intermediate material layers (not shown in FIG. 1).

“Cavity” has its conventional meaning of “an empty space within a solid body.” The cavity 140 may be a hole completely through the substrate 120 (as shown in Section A-A and Section B-B) or a recess in the substrate 120 under the diaphragm 115. The cavity 140 may be formed, for example, by selective etching of the substrate 120 before or after the piezoelectric plate 110 and the substrate 120 are attached.

The conductor pattern of the XBAR 100 includes an interdigital transducer (IDT) 130. The IDT 130 includes a first plurality of parallel fingers, such as finger 136, extending from a first busbar 132 and a second plurality of fingers extending from a second busbar 134. The first and second pluralities of parallel fingers are interleaved. The interleaved fingers overlap for a distance AP, commonly referred to as the “aperture” of the IDT. The direction parallel to the IDT fingers will be referred to herein as the “aperture direction”. The center-to-center distance L between the outermost fingers of the IDT 130 is the “length” of the IDT. The direction perpendicular to the IDT fingers will be referred to herein as the “length direction.”

The first and second busbars 132, 134 serve as the terminals of the XBAR 100. A radio frequency or microwave signal applied between the two busbars 132, 134 of the IDT 130 excites a primary acoustic mode within the piezoelectric plate 110. As will be discussed in further detail, the primary acoustic mode is a bulk shear mode where acoustic energy propagates along a direction substantially orthogonal to the surface of the piezoelectric plate 110, which is also normal, or transverse, to the direction of the electric field created by the IDT fingers. Thus, the XBAR is considered a transversely-excited film bulk wave resonator.

The IDT 130 is positioned on the piezoelectric plate 110 such that at least the fingers of the IDT 130 are disposed on the diaphragm 115 of the piezoelectric plate which spans, or is suspended over, the cavity 140. As shown in FIG. 1, the cavity 140 has a rectangular shape with an extent greater than the aperture AP and length L of the IDT 130. A cavity of an XBAR may have a different shape, such as a regular or irregular polygon. The cavity of an XBAR may have more or fewer than four sides, which may be straight or curved.

For ease of presentation in FIG. 1, the geometric pitch and mark (“mark” is a term commonly used to refer to the dimension perpendicular to the long axis of a conductor such as an IDT finger) of the IDT fingers is greatly exaggerated with respect to the length (dimension L) and aperture (dimension AP) of the XBAR. A typical XBAR has more than ten parallel fingers in the IDT 110. An XBAR may have hundreds of parallel fingers in the IDT 110. Similarly, the thickness of the fingers in the cross-sectional views is greatly exaggerated.

Referring to the detailed cross-sectional view (Detail C), a front-side dielectric layer 150 may optionally be formed on the front side of the piezoelectric plate 110. The “front side” of the XBAR is, by definition, the surface facing away from the substrate. The front-side dielectric layer 150 may be formed only between the IDT fingers (e.g. IDT finger 138 b) or may be deposited as a blanket layer such that the dielectric layer is formed both between and over the IDT fingers (e.g. IDT finger 138 a). The front-side dielectric layer 150 may be a non-piezoelectric dielectric material, such as silicon dioxide or silicon nitride. The thickness of the front side dielectric layer is typically less than or equal to the thickness of the piezoelectric plate. The front-side dielectric layer 150 may be formed of multiple layers of two or more materials.

The IDT fingers 138 a and 138 b may be aluminum, an aluminum alloy, copper, a copper alloy, beryllium, gold, tungsten, molybdenum or some other conductive material. The IDT fingers are considered to be “substantially aluminum” if they are formed from aluminum or an alloy comprising at least 50% aluminum. The IDT fingers are considered to be “substantially copper” if they are formed from copper or an alloy comprising at least 50% copper. Thin (relative to the total thickness of the conductors) layers of other metals, such as chromium or titanium, may be formed under and/or over and/or as layers within the fingers to improve adhesion between the fingers and the piezoelectric plate 110 and/or to passivate or encapsulate the fingers and/or to improve power handling. The busbars 132, 134 of the IDT may be made of the same or different materials as the fingers.

Dimension p is the center-to-center spacing or “pitch” of the IDT fingers, which may be referred to as the pitch of the IDT and/or the pitch of the XBAR. Dimension m is the mark of the IDT fingers.

As shown in DETAIL C, IDT finger 138 a has a trapezoidal cross-sectional shape and IDT finger 138 b has a rectangular cross-sectional shape. The IDT fingers 138 a, 138 b may have some other cross-section, such as T-shaped or stepped. The IDT fingers 138 a, 138 b are shown as single layer structures which may be aluminum or some other metal. IDT fingers may include multiple layers of materials, which may be selected to have different acoustic loss and/or different acoustic impedance. When multiple material layers are used, the cross-sectional shapes of the layers may be different. Further, a thin adhesion layer of another material, such as titanium or chrome, may be formed between the IDT fingers 138 a, 138 b and the piezoelectric plate 110. Although not shown in FIG. 1, some or all IDT fingers may be disposed in grooves or slots extending partially or completely through the piezoelectric plate 110.

FIG. 2 shows a simplified schematic top view and a cross-sectional view of an XBAR 200 with concentric IDT fingers. The XBAR 200 includes a piezoelectric plate 210 supported by a substrate 220. A portion of the piezoelectric plate forms a diaphragm 215 spanning a cavity 240 in the substrate 220. The cavity 240 may be a hole completely through the substrate 220 (as shown in Section D-D) or a recess in the substrate 220 under the diaphragm 215. The cavity 240 may be formed, for example, by selective etching of the substrate 220 before or after the piezoelectric plate 120 and the substrate 220 are attached.

The perimeter of the cavity 240, indicated by the dashed line 245, may be circular. A circular cavity, without corners, may have lower maximum stress that a rectangular cavity with corners.

A conductor pattern including an interdigital transducer 230 is formed on the front surface (the surface facing away from the cavity 240) of the piezoelectric plate 210. Suitable materials for the conductor pattern were previously described. The IDT includes first and second busbars 232, 234 and a plurality of interleaved fingers such as finger 236. The interleaved fingers extend alternately from the first and second bus bars 232, 234. Each finger is an arc of one of a series of concentric circles. In this example, the first and second busbars extend in opposing directions from the center of the concentric circles such that the arc-length of each IDT finger approaches 180 degrees. In this context, “approaches” means “close to but less than”. The exact arc-length of each IDT finger depends on the width of the busbars 232, 234 and the gaps between the ends of the IDT finger arcs and the busbars.

The pitch p of the IDT fingers is measured radially, which is to say the pitch is the difference between the radii of two adjacent fingers. The mark or width of the IDT fingers is also measured radially. The mark of a finger is the different between the outer and inner radii of the finger. In this example, the mark and pitch of the IDT fingers is constant over the area of the IDT.

FIG. 3 shows a simplified schematic top view and a cross-sectional view of another XBAR 300 with concentric IDT fingers. The XBAR 300 includes a piezoelectric plate 310 supported by a substrate 320. A portion of the piezoelectric plate forms a diaphragm 315 spanning a cavity 340 in the substrate 320. The cavity 340 may be a hole completely through the substrate 320 (as shown in Section E-E) or a recess in the substrate 230 under the diaphragm 315. The perimeter of the cavity 340, indicated by the dashed line 345, may be circular.

A conductor pattern including an interdigital transducer 330 is formed on the front surface (the surface facing away from the cavity 340) of the piezoelectric plate 310. Suitable materials for the conductor pattern were previously described. The IDT includes first and second busbars 332, 334 and a plurality of interleaved fingers such as finger 336. The interleaved fingers extend alternately from the first and second bus bars 332, 334. Each finger is an arc of one of a series of concentric circles. In this example, the first and second busbars extend in parallel from the center of the concentric circles such that the arc-length of each IDT finger approaches 360 degrees.

The pitch p and mark m of the IDT fingers are measured radially, as previously described. In this example, the mark and pitch of the IDT fingers is constant over the area of the IDT.

FIG. 4 shows a simplified schematic top view of an interdigital transducer 430. The IDT 430 includes first and second busbars 432, 434 and a plurality of concentric interleaved fingers such as fingers 436A, 436B. The interleaved fingers extend alternately from the first and second bus bars 432, 434.

The two busbars 432, 434 extend outward from the center of the concentric fingers along radial lines separated by the angle ϕ. In this example, ϕ=90°. The IDT 230 of FIG. 2 illustrates the case where ϕ=180°. ϕ may be smaller than 90°. However, as ϕ approaches zero, both of the busbars cannot be centered along radial lines, as shown in FIG. 3.

When ϕ is not equal to 0 or 180°, fingers extending in opposite directions from each busbar 432, 434 with have different arc-lengths. In this example, finger 436A has an arc-length approaching ϕ and finger 436B has an arc-length approaching 360°−ϕ. A first half of the IDT fingers have respective arc-lengths approaching ϕ and a second half of the IDT fingers have respective arc-lengths approaching 360°−ϕ.

The piezoelectric plates 110, 210, 310 in the previous examples may be Z-cut lithium niobate (LN) or lithium tantalate (LT). The velocity of the primary shear acoustic wave for Z-cut LN and LT is isotropic, which is to say the velocity is constant, or nearly constant, and independent of the direction of the applied electric field. When the piezoelectric plate is Z-cut LN or LT, the IDT fingers may be concentric circular arcs and the perimeter of the cavity may be circular, as shown in FIG. 2, FIG. 3, and FIG. 4.

For other piezoelectric materials or other cut angles, the velocity may be anisotropic and change as a function of the angle of the applied electric field. FIG. 5A is an exemplary graph of acoustic velocity p(θ) as a function of the angle of the applied electric field θ, where x and y are orthogonal directions on the surface of the piezoelectric plate. p(θ) may be calculated from the known physical parameters of the piezoelectric material.

Differences in acoustic velocity will, unless compensated, result in differences in the resonance and anti-resonance frequencies of an XBAR as functions of the angle of the applied electric field θ. These differences may be compensated, at least in part, by altering the pitch of the IDT fingers as a function of θ, as illustrated in FIG. 5B which shows a plan view of an IDT 530 with concentric elliptical fingers. In this case, the perimeter of the cavity (not shown) under the IDT fingers may also be elliptical.

FIG. 6 is a schematic circuit diagram and layout for a high frequency band-pass filter 600 using XBARs. The filter 600 has a conventional ladder filter architecture including three series resonators 610A, 610B, 610C and two shunt resonators 620A, 620B. The three series resonators 610A, 610B, and 610C are connected in series between a first port and a second port (hence the term “series resonator”). In FIG. 6, the first and second ports are labeled “In” and “Out”, respectively. However, the filter 600 is bidirectional and either port may serve as the input or output of the filter. The two shunt resonators 620A, 620B are connected from nodes between the series resonators to ground. A filter may contain additional reactive components, such as capacitors and/or inductors, not shown in FIG. 6. All the shunt resonators and series resonators are XBARs. The inclusion of three series and two shunt resonators is exemplary. A filter may have more or fewer than five total resonators, more or fewer than three series resonators, and more or fewer than two shunt resonators. Typically, all of the series resonators are connected in series between an input and an output of the filter. All of the shunt resonators are typically connected between ground and one of the input, the output, or a node between two series resonators.

In the exemplary filter 600, the three series resonators 610A, B, C and the two shunt resonators 620A, B of the filter 600 are formed on a single plate 630 of piezoelectric material bonded to a silicon substrate (not visible). In some filters, the series resonators and shunt resonators may be formed on different plates of piezoelectric material. Each resonator includes a respective IDT (not shown), with at least the fingers of the IDT disposed over a cavity in the substrate. In this and similar contexts, the term “respective” means “relating things each to each”, which is to say with a one-to-one correspondence. In FIG. 6, the cavities are illustrated schematically as the dashed rectangles (such as the rectangle 635). In this example, each IDT is disposed over a respective cavity. In other filters, the IDTs of two or more resonators may be disposed over a single cavity.

Each of the resonators 610A, 610B, 610C, 620A, 620B in the filter 600 has resonance where the admittance of the resonator is very high and an anti-resonance where the admittance of the resonator is very low. The resonance and anti-resonance occur at a resonance frequency and an anti-resonance frequency, respectively, which may be the same or different for the various resonators in the filter 600. In over-simplified terms, each resonator can be considered a short-circuit at its resonance frequency and an open circuit at its anti-resonance frequency. The input-output transfer function will be near zero at the resonance frequencies of the shunt resonators and at the anti-resonance frequencies of the series resonators. In a typical filter, the resonance frequencies of the shunt resonators are positioned below the lower edge of the filter's passband and the anti-resonance frequencies of the series resonators are positioned above the upper edge of the passband. In some filters, a front-side dielectric layer (also called a “frequency setting layer”), represented by the dot-dash rectangle 670, may be formed on the shunt resonators to set the resonance frequencies of the shunt resonators lower relative to the resonance frequencies of the series resonators. In other filters, the diaphragms of series resonators may be thinner than the diaphragms of shunt resonators. In some filters, the series resonators and the shunt resonators may be fabricated on separate chips having different piezoelectric plate thicknesses. In other filters, to be discussed subsequently, there may be dielectric layers of differing thickness between the IDTs of the resonators and the piezoelectric plate.

Although the resonators and cavities are shown in FIG. 6 as rectangles, one, some, or all of the resonators 610A, 610B, 610C, 620A, 620B may have concentric IDT fingers as shown in FIG. 2, FIG. 3, FIG. 4 and FIG. 5B. Resonators with concentric fingers may have cavities with circular or elliptical perimeters.

Description of Methods

FIG. 7 is a simplified flow chart summarizing a process 700 for fabricating a filter device incorporating XBARs with structures for reducing acoustic energy leakage. Specifically, the process 700 is for fabricating a filter device including multiple XBARs, some of which may include a frequency setting dielectric or coating layer. The process 700 starts at 705 with a device substrate and a thin plate of piezoelectric material disposed on a sacrificial substrate. The process 700 ends at 795 with a completed filter device. The flow chart of FIG. 7 includes only major process steps. Various conventional process steps (e.g. surface preparation, cleaning, inspection, baking, annealing, monitoring, testing, etc.) may be performed before, between, after, and during the steps shown in FIG. 7.

While FIG. 7 generally describes a process for fabricating a single filter device, multiple filter devices may be fabricated simultaneously on a common wafer (consisting of a piezoelectric plate bonded to a substrate). In this case, each step of the process 700 may be performed concurrently on all of the filter devices on the wafer.

The flow chart of FIG. 7 captures three variations of the process 700 for making an XBAR which differ in when and how cavities are formed in the device substrate. The cavities may be formed at steps 710A, 710B, or 710C. Only one of these steps is performed in each of the three variations of the process 700.

The piezoelectric plate may typically be Z-cut lithium niobate. The piezoelectric plate may be some other material and/or some other cut. The device substrate may preferably be silicon. The device substrate may be some other material that allows formation of deep cavities by etching or other processing.

In one variation of the process 700, one or more cavities are formed in the device substrate at 710A, before the piezoelectric plate is bonded to the substrate at 715. A separate cavity may be formed for each resonator in a filter device. Also, the cavities can be shaped and formed such that two or more resonators can be on one diaphragm over one cavity. These resonators sharing a diaphragm are acoustically coupled on an acoustic track. The one or more cavities may be formed using conventional photolithographic and etching techniques. Typically, the cavities formed at 710A will not penetrate through the device substrate.

At 715, the piezoelectric plate is bonded to the device substrate. The piezoelectric plate and the device substrate may be bonded by a wafer bonding process. Typically, the mating surfaces of the device substrate and the piezoelectric plate are highly polished. One or more layers of intermediate materials, such as an oxide or metal, may be formed or deposited on the mating surface of one or both of the piezoelectric plate and the device substrate. One or both mating surfaces may be activated using, for example, a plasma process. The mating surfaces may then be pressed together with considerable force to establish molecular bonds between the piezoelectric plate and the device substrate or intermediate material layers.

At 720, the sacrificial substrate may be removed. For example, the piezoelectric plate and the sacrificial substrate may be a wafer of piezoelectric material that has been ion implanted to create defects in the crystal structure along a plane that defines a boundary between what will become the piezoelectric plate and the sacrificial substrate. At 720, the wafer may be split along the defect plane, for example by thermal shock, detaching the sacrificial substrate and leaving the piezoelectric plate bonded to the device substrate. The exposed surface of the piezoelectric plate may be polished or processed in some manner after the sacrificial substrate is detached.

A first conductor pattern, including IDTs of each XBAR, is formed at 730 by depositing and patterning one or more conductor layers on the front side of the piezoelectric plate. The conductor layer may be, for example, aluminum, an aluminum alloy, copper, a copper alloy, or some other conductive metal. Optionally, one or more layers of other materials may be disposed below (i.e. between the conductor layer and the piezoelectric plate) and/or on top of the conductor layer. For example, a thin film of titanium, chrome, or other metal may be used to improve the adhesion between the conductor layer and the piezoelectric plate. A second conductor pattern of gold, aluminum, copper or other higher conductivity metal may be formed over portions of the first conductor pattern (for example the IDT bus bars and interconnections between the IDTs).

Each conductor pattern may be formed at 730 by depositing the conductor layer and, optionally, one or more other metal layers in sequence over the surface of the piezoelectric plate. The excess metal may then be removed by etching through patterned photoresist. The conductor layer can be etched, for example, by plasma etching, reactive ion etching, wet chemical etching, or other etching techniques.

Alternatively, each conductor pattern may be formed at 730 using a lift-off process. Photoresist may be deposited over the piezoelectric plate. and patterned to define the conductor pattern. The conductor layer and, optionally, one or more other layers may be deposited in sequence over the surface of the piezoelectric plate. The photoresist may then be removed, which removes the excess material, leaving the conductor pattern.

At 750, one or more frequency setting dielectric layer(s) may optionally be formed by depositing one or more layers of dielectric material on the front side of the piezoelectric plate. For example, a dielectric layer may be formed over the shunt resonators to lower the frequencies of the shunt resonators relative to the frequencies of the series resonators. The one or more dielectric layers may be deposited using a conventional deposition technique such as physical vapor deposition, atomic layer deposition, chemical vapor deposition, or some other method. One or more lithography processes (using photomasks) may be used to limit the deposition of the dielectric layers to selected areas of the piezoelectric plate. For example, a mask may be used to limit a dielectric layer to cover only the shunt resonators.

At 755, a passivation/tuning dielectric layer is deposited over the piezoelectric plate and conductor patterns. The passivation/tuning dielectric layer may cover the entire surface of the filter except for pads for electrical connections to circuitry external to the filter. In some instantiations of the process 700, the passivation/tuning dielectric layer may be formed after the cavities in the device substrate are etched at either 710B or 710C.

In a second variation of the process 700, one or more cavities are formed in the back side of the device substrate at 710B. A separate cavity may be formed for each resonator in a filter device. Also, the cavities can be shaped and formed such that two or more resonators can be on one diaphragm over one cavity. These resonators sharing a diaphragm are acoustically coupled on an acoustic track. The one or more cavities may be formed using an anisotropic or orientation-dependent dry or wet etch to open holes through the back side of the device substrate to the piezoelectric plate. In this case, the resulting resonator devices will have a cross-section as shown in FIG. 1.

In a third variation of the process 700, one or more cavities in the form of recesses in the device substrate may be formed at 710C by etching the substrate using an etchant introduced through openings in the piezoelectric plate. A separate cavity may be formed for each resonator in a filter device. Also, the cavities can be shaped and formed such that two or more resonators can be on one diaphragm over one cavity. These resonators sharing a diaphragm are acoustically coupled on an acoustic track. The one or more cavities formed at 710C will not penetrate through the device substrate.

Ideally, after the cavities are formed at 710B or 710C, most or all of the filter devices on a wafer will meet a set of performance requirements. However, normal process tolerances will result in variations in parameters such as the thicknesses of dielectric layer formed at 750 and 755, variations in the thickness and line widths of conductors and IDT fingers formed at 745, and variations in the thickness of the piezoelectric plate. These variations contribute to deviations of the filter device performance from the set of performance requirements.

To improve the yield of filter devices meeting the performance requirements, frequency tuning may be performed by selectively adjusting the thickness of the passivation/tuning layer deposited over the resonators at 755. The frequency of a filter device passband can be lowered by adding material to the passivation/tuning layer, and the frequency of the filter device passband can be increased by removing material to the passivation/tuning layer. Typically, the process 700 is biased to produce filter devices with passbands that are initially lower than a required frequency range but can be tuned to the desired frequency range by removing material from the surface of the passivation/tuning layer.

At 760, a probe card or other means may be used to make electrical connections with the filter to allow radio frequency (RF) tests and measurements of filter characteristics such as input-output transfer function. Typically, RF measurements are made on all, or a large portion, of the filter devices fabricated simultaneously on a common piezoelectric plate and substrate.

At 765, global frequency tuning may be performed by removing material from the surface of the passivation/tuning layer using a selective material removal tool such as, for example, a scanning ion mill as previously described. “Global” tuning is performed with a spatial resolution equal to or larger than an individual filter device. The objective of global tuning is to move the passband of each filter device towards a desired frequency range. The test results from 760 may be processed to generate a global contour map indicating the amount of material to be removed as a function of two-dimensional position on the wafer. The material is then removed in accordance with the contour map using the selective material removal tool.

At 770, local frequency tuning may be performed in addition to, or instead of, the global frequency tuning performed at 765. “Local” frequency tuning is performed with a spatial resolution smaller than an individual filter device. The test results from 760 may be processed to generate a map indicating the amount of material to be removed at each filter device. Local frequency tuning may require the use of a mask to restrict the size of the areas from which material is removed. For example, a first mask may be used to restrict tuning to only shunt resonators, and a second mask may be subsequently used to restrict tuning to only series resonators (or vice versa). This would allow independent tuning of the lower band edge (by tuning shunt resonators) and upper band edge (by tuning series resonators) of the filter devices.

After frequency tuning at 765 and/or 770, the filter device is completed at 775. Actions that may occur at 775 include forming bonding pads or solder bumps or other means for making connection between the device and external circuitry (if such pads were not formed at 745); excising individual filter devices from a wafer containing multiple filter devices; other packaging steps; and additional testing. After each filter device is completed, the process ends at 795.

CLOSING COMMENTS

Throughout this description, the embodiments and examples shown should be considered as exemplars, rather than limitations on the apparatus and procedures disclosed or claimed. Although many of the examples presented herein involve specific combinations of method acts or system elements, it should be understood that those acts and those elements may be combined in other ways to accomplish the same objectives. With regard to flowcharts, additional and fewer steps may be taken, and the steps as shown may be combined or further refined to achieve the methods described herein. Acts, elements and features discussed only in connection with one embodiment are not intended to be excluded from a similar role in other embodiments.

As used herein, “plurality” means two or more. As used herein, a “set” of items may include one or more of such items. As used herein, whether in the written description or the claims, the terms “comprising”, “including”, “carrying”, “having”, “containing”, “involving”, and the like are to be understood to be open-ended, i.e., to mean including but not limited to. Only the transitional phrases “consisting of” and “consisting essentially of”, respectively, are closed or semi-closed transitional phrases with respect to claims. Use of ordinal terms such as “first”, “second”, “third”, etc., in the claims to modify a claim element does not by itself connote any priority, precedence, or order of one claim element over another or the temporal order in which acts of a method are performed, but are used merely as labels to distinguish one claim element having a certain name from another element having a same name (but for use of the ordinal term) to distinguish the claim elements. As used herein, “and/or” means that the listed items are alternatives, but the alternatives also include any combination of the listed items. 

It is claimed:
 1. An acoustic resonator, comprising: a substrate; a piezoelectric plate, a portion of the piezoelectric plate being a diaphragm spanning a cavity in the substrate; and a conductor pattern on a front surface of the piezoelectric plate, the conductor pattern comprising concentric interleaved interdigital transducer (IDT) fingers extending alternately from first and second busbars, wherein the IDT fingers are on the diaphragm.
 2. The acoustic resonator of claim 1, wherein the IDT fingers are concentric circular arcs.
 3. The acoustic resonator of claim 2, wherein a perimeter of the cavity is circular.
 4. The acoustic resonator of claim 2, wherein a pitch of the IDT fingers, defined as a radial distance between centers of adjacent fingers, is constant.
 5. The acoustic resonator of claim 2, wherein a mark of the IDT fingers, defined as a difference between an inner and outer radius of each of the IDT fingers, is constant.
 6. The acoustic resonator of claim 2, wherein an angle ϕ between a centerline of the first busbar and a centerline of the second bus bar is 180°, and an arc length of each IDT finger approaches 180°.
 7. The acoustic resonator of claim 2, wherein an angle ϕ between a centerline of the first busbar and a centerline of the second bus bar is greater than or equal to zero and less than 180°, an arc length of a first half of the IDT fingers approaches ϕ, and an arc length of a second half of the IDT fingers approaches 360°−ϕ.
 8. The acoustic resonator of claim 1, wherein the IDT fingers are concentric ellipses.
 9. The acoustic resonator of claim 8, wherein a velocity of a primary acoustic wave varies with a direction of applied electric field, and a pitch of the IDT fingers, defined as a radial distance between centers of adjacent IDT fingers, varies in accordance with the velocity.
 10. A filter device, comprising: a piezoelectric plate, portions of the piezoelectric plate being diaphragms spanning respective cavities in a substrate; and a conductor pattern on a front surface of the piezoelectric plate, the conductor pattern comprising a plurality of interdigital transducers (IDTs), each IDT comprising interleaved IDT fingers connected alternately to first and second busbars, wherein the IDT fingers of each IDT are on a respective diaphragm, and the IDT fingers of at least a first IDT are concentric.
 11. The filter device of claim 10, wherein the IDT fingers of the first IDT are concentric circular arcs.
 12. The filter device of claim 11, wherein a perimeter of the cavity of the first IDT is circular.
 13. The filter device of claim 11, wherein a pitch, defined as a radial distance between centers of adjacent fingers, of the IDT fingers of the first IDT is constant.
 14. The filter device of claim 11, wherein a mark, defined as a difference between an inner and outer radius of each of the IDT fingers of the first IDT is constant.
 15. The a filter device of claim 11, wherein an angle ϕ between a centerline of the first and second busbars of the first IDT is 180°, and an arc length of each IDT finger of the first IDT approaches 180°.
 16. The filter device of claim 11, wherein an angle ϕ between a centerline of the first and second busbars of the first IDT is greater than or equal to zero and less than 180°, an arc length of a first half of the IDT fingers of the first IDT approaches ϕ, and an arc length of a second half of the IDT fingers of the first IDT approaches 360°−ϕ.
 17. The filter device of claim 10, wherein the IDT fingers of the first IDT are concentric ellipses.
 18. The filter device of claim 17, wherein a velocity of a primary acoustic wave varies with a direction of applied electric field, and a pitch, defined as a radial distance between centers of adjacent fingers, of the IDT fingers of the first IDT, varies in accordance with the velocity. 